2000
2000
D.J. Quiram, K. F. Jensen, and M. A. Schmidt, J. F. Ryley, P. L. Mills, M. D. Wetzel, J. W. Ashmead, R. D. Bryson, D. J. Kraus, and A. P. Stamford, “Package level integration of silicon microfabricated reactors to form a miniature reactor test system,” Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop, 2000, Hilton Head, SC pp.166-169.
K.F. Jensen,”The impact of MEMS on the chemical and pharmaceutical industries,” Technical Digest of the 2000 Solid-State Sensor and Actuator Workshop, 2000, Hilton Head, SC pp. 105-110. (Invited)
S. L. Firebaugh, K.F. Jensen, M. A. Schmidt, “Miniaturization and integration of photoacoustic detection with a microfabricated chemical reactor system,” in Micro Total Analysis System 2000, (eds. A. Van den Berg, W. Olthuis, and P. Bergveld), Kluwer Academic Publishers, pp.49-52
R.J. Jackman, T. M. Floyd, M.A. Schmidt and K.F. Jensen, “Development of methods for on-line chemical detection with liquid-phase microchemical reactors using conventional and unconventional techniques,” in Micro Total Analysis System 2000, (eds. A. Van den Berg, W. Olthuis, and P. Bergveld), Kluwer Academic Publishers, pp.155-158.
T.M. Floyd, K.F., Jensen, M.A Schmidt, “Towards integration of chemical detection for liquid phase microchannel reactors,” Proceedings 4th Intl Conf. Microreaction Technology (Ed., I. Rinard), Am. Inst. Chem. Eng., New York (2000) pp. 461-466.
M.W. Losey, S. Isogai, M.A. Schmidt, and K.F. Jensen, “Microfabricated devices for multiphase catalytic process,” Proceedings 4th Intl Conf. Microreaction Technology (Ed., I. Rinard), Am. Inst. Chem. Eng., New York (2000) pp. 416-424.
R.J. Jackman, T.M. Floyd, R. Ghodssi, M.A. Schmidt, and K.F. Jensen,” Integrated microchemical reactors fabricated by both conventional and unconventional techniques,” Proceedings 4th Intl Conf. Microreaction Technology (Ed., I. Rinard), Am. Inst. Chem. Eng., New York (2000) pp. 62-70.
D.J. Quiram, K.F. Jensen, M.A. Schmidt, J.F. Ryley, P.L. Mills, M.D. Wetzel, J.W. Ashmead, R.D. Bryson, T.M. Delaney, D.J. Kraus, and J.S. McCracken, “Development of a turnkey multiple microreactor test station,” Proceedings 4th Intl Conf. Microreaction Technology (Ed., I. Rinard), Am. Inst. Chem. Eng., New York (2000) pp. 55-61.
J. Lee, V.C. Sundar, J.R. Heine, M.G. Bawendi, and K.F. Jensen, “Full color emission from II-VI semiconductor quantum dot-polymer composites,” Adv. Materials, 12, 1102-1105 (2000).
K.M. Vaeth and K.F. Jensen, “Blue electroluminescent copolymers by parylene-based chemical vapor deposition,” Macromolecules, 33, 5336-5339 (2000).
M.W. Losey, M.A. Schmidt and K.F. Jensen, “Microfabricated multiphase packed-bed reactors: Characterization of mass transfer and reactions,” I&EC Research, 40, 2555-2562 (2001).
J.P.A.M. Driessen, J. Schoonman, and K.F. Jensen, “Infrared spectroscopic study of decomposition of Ti(N(CH3)2)4,” J. Electrochem. Soc., 148, G178-G184 (2001).
K. M. Vaeth, R.J. Jackman, A.J. Black, G.M. Whitesides, and K. F. Jensen, “Use of microcontact printing for selective growth of poly(p-phenylene vinylene) and parylenes prepared by chemical vapor deposition,” Langmuir, 16, 8492-8500 (2000).
G.S. Kim, U. Hansen, S.T.Rodgers, and K.F. Jensen,”Effects of transient diffusion on IPVD features scale evolution,” in “Fundamental Mechanisms of Low-Energy-Beam-Modified Surface Growth and Processing,” E.H. Chason, R.M.V. Murty, T.D. de la Rubia, and J.M.E. Harper (Eds.), Mater. Res. Soc. Symp. Proc. 585, 15-20 (2000).
U. Hansen, S.T.Rodgers, M. Nemirovskaya, and K.F. Jensen,” Modeling metal film growth under IPVD conditions using molecular dynamics rates in a level set approach,” in “Fundamental Mechanisms of Low-Energy-Beam-Modified Surface Growth and Processing,” E.H. Chason, R.M.V. Murty, T.D. de la Rubia, and J.M.E. Harper (Eds.), Mater. Res. Soc. Symp. Proc. 585, 233-238 (2000).
I. Lengyel and Klavs F. Jensen, “A chemical mechanism for in situ boron doping during silicon chemical vapor deposition”, Thin Solid Films, 365, 231-241 (2000).
B.G. Willis and K. F. Jensen,” Gas-phase reaction pathways of aluminum organometallic compounds with dimethylaluminum hydride and alane as model systems,” J. Phys. Chem A, 104 (33) 7881-7891 (2000).
K. M. Vaeth and K. F. Jensen, “Transition metals for selective chemical vapor deposition of parylene-based polymers,” Chem. Mats., 12 (5), 1305-1313 (2000).
U. Hansen, S.T. Rodgers and K. F. Jensen, “A multiscale approach for ionized physical vapor deposition: The growth of Al thin films under argon ions bombardment,” Phys. Rev.B, Condens. Matter Mater. Phys., 62(4), 2869-2878 (2000).
K. F. Jensen, S. K. Ajmera, S. L. Firebaugh, T.M. Floyd, A. J. Franz, M.W. Losey, David Quiram, and Martin A. Schmidt, “Microfabricated chemical systems for product screening and synthesis,” invited contribution to “Automated Synthetic Methods for Specialty Chemicals”, (Ed. W. Hoyle), Royal Society of Chemistry, London, (2000) pp.14-24
J. Rodríguez-Viejo,A, H. Mattoussi, J.R. Heine, M.K. Kuno, J. Michell M.G. Bawendi, and K.F.Jensen, “Evidence of photo and electrodarkening of (CdSe)ZnS quantum dot composites,” J. Appl. Phys., 87(12), 8526-8534 (2000).
D. J. Quiram, I-M. Hsing, A. J. Franz, K. F. Jensen, and M. A. Schmidt, “Design issues for membrane-based, gas phase microchemical systems,” Chem. Eng. Sci. 55 (16), 3065-3075 (2000).
D. J. Quiram, K. F. Jensen, and M. A. Schmidt, “Integrated microchemical systems: Opportunities for process design,” invited paper Fifth Int’l Conf. on Foundations of Computer Aided process Design (FOCAPD’99), Colorado (1999). AIChE Symp. Ser., 323 , 147-162 (2000)
A. J. Franz, S. K. Ajmera, S. L. Firebaugh, K. F. Jensen, and M. A. Schmidt , “Expansion of microreactor capabilities through improved thermal management and catalyst deposition,” Microrection Technology:Industrial Prospects. Proc. 3rd International Conference on Microreaction Technology, (Ed. W. Ehrfeld), Springer, Berlin (2000) pp. 197-206.
T. M. Floyd, M. W. Losey, S. L. Firebaugh, K. F. Jensen, and M. A. Schmidt , “Novel liquid phase microreactors for safe production of hazardous specialty chemicals,” Microrection Technology:Industrial Prospects. Proc. 3rd International Conference on Microreaction Technology, (Ed. W. Ehrfeld), Springer, Berlin (2000) pp. 171-180.
M.W. Losey, M.A. Schmidt and K.F. Jensen, “A micro packed-bed reactor for chemical synthesis,” Microrection Technology:Industrial Prospects. Proc. 3rd International Conference on Microreaction Technology, (Ed. W. Ehrfeld), Springer, Berlin (2000) pp. 277-286.
A. J. Franz, K. F. Jensen, M. A. Schmidt, “Palladium membrane microreactors,” Microrection Technology:Industrial Prospects. Proc. 3rd International Conference on Microreaction Technology, (Ed. W. Ehrfeld), Springer, Berlin (2000) pp 267-276.
I.-M. Hsing, R. Srinivasan, M.P. Harold, K.F. Jensen, and M.A. Schmidt, “Simulations of micromachined chemical reactors for heterogeneous partial oxidation reactions,” Chem. Eng. Sci. 55(1), 3-13 (2000).
1999
1999
K.F. Jensen, “Microchemical systems: Status, challenges, and opportunities”, AIChE J. 45, (10) 2051-2054 (1999).
K. M. Vaeth and K. F. Jensen, “Selective growth of poly(p-phenylene vinylene) prepared by chemical vapor deposition,” Adv. Materials., 11, (10) 814-820 (1999).
A. J. Franz, K. F. Jensen, M. A. Schmidt, “Palladium based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions,” Technical Digest 12th International Conference on MicroElectroMechanical Systems, IEEE, p.382-387 (1999).
C. Cavallotti and K. F. Jensen, “A density functional theory study of chemical vapor deposition of copper from (HFAC)Cu-L compounds,” to appear in Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis, (Allendorf, M.D., and Zachariah, M., Eds.) Proc. – Electrochem. Soc., 98-23, 10-15 (1999).
V. Gupta, I. Lengyel, T.G. Mihopoulos, and K.F. Jensen, “Reaction pathways in organometallic chemical vapor deposition of AlGaN,” to appear in Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Materials Synthesis, (Allendorf, M.D., and Zachariah, M., Eds.) Proc. – Electrochem. Soc., 98-23, 280-285 (1999).
D.C. Duffy, R.J. Jackman, K.M. Vaeth, K.F. Jensen, and G.M. Whitesides, “Patterning electroluminescent materials at feature sizes as small as 5 цm using elastometric membranes as masks for dry lift-off,” Advanced Materials 11(7), 546-552 (1999).
1998
1998
Mattoussi H, Rodriguez-Viejo J, Jensen KF, Bawendi MG, Rubner MF. Electroluminescence and cathodoluminescence from inorganic CdSe nanocrystals embedded in thin films.” SPIE-Int. Soc. Opt. Eng. Proceedings of SPIE 3476, 310-21 (1998).
K.F. Jensen, S.T. Rodgers, and R.Venkataramani, “Multiscale modeling of thin film growth,” Current Opinion in Solid State and Materials Science, 3 (6), 562-569 (1998).
Klavs F. Jensen, Samara L. Firebaugh, Aleksander J. Franz, David Quiram, R. Srinivasan, and Martin A. Schmidt, “Integrated gas phase microreactors,” in Micro Total Analysis Systems ’98 (Harrison, J.D., van den Berg, A., Eds.) Kluwer, Dordrecht (1998) pp. 463-468.
C.J. Vineis, C.A. Wang, K.F. Jensen, and W.G. Breiland, “In-situ monitoring of GaSb, GaInAsSb, and AlGaAsSb,” J. Crystal Growth, 195 (1-4) 181-186 (1998).
J.R. Heine, J. Rodriguez-Viejo, M.G. Bawendi, and K.F. Jensen, “Synthesis of CdSe quantum dot ZnS matrix thin films via electrospray organometallic chemical vapor deposition,” J. Crystal Growth, 195(1-4), 564-568 (1998).
T.G. Mihopoulos, V. Gupta, and K.F. Jensen, “A reaction-transport model for AlGaN MOVPE growth,” J. Crystal Growth, 195 (1-4), 733-739 (1998).
T.G. Mihopoulos, S.G. Hummel, and K.F. Jensen, “Simulation of flow and growth phenomena in a close-spaced reactor,” J. Crystal Growth, 195 (1-4), 725-732 (1998).
K.F. Jensen, “Smaller faster chemistry,” Nature 393, 735-737 (1998)
B.H. Cumpston and K.F. Jensen, “Bulk and interface degradation processes in polymer electroluminescent devices,” in Metallized Plastics 5&6: Fundamental and Applied Aspects, K.L. Mittal (Ed.), VSP International Science Publishers, The Netherlands 1998, p. 255-268.
K.M. Vaeth and K.F. Jensen, “Poly(p-phenylene vinylene) prepared by chemical vapor deposition: Influence of monomer selection and reaction conditions on film composition and luminescence properties,” Macromolecules, 31 (20), 6789-6793 (1998).
I-M. Hsing, R. Srinivasan, K.F. Jensen, and M.A. Schmidt, “Finite element approach for reactive microfluidic devices,” Proceedings of First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators (Santa Clara, April 6-8, 1998), Computational Publications, Cambridge, MA, (1998) 492-7.
S. Banerjee, J.V. Cole, and K.F. Jensen, “Designing reduced-order models for rapid thermal processing systems,” J. Electrochem. Soc., 145 (11), 3974-3981, (1998).
A. J. Franz, D. Quiram, R. Srinivasan, I-M. Hsing, S. L. Firebaugh, K. F. Jensen, and M. A. Schmidt, “New operating regimes and applications feasible with microreactors,” in the Proceedings of the 2nd International Conference on Microreaction Technology, AIChE (1998) 33-38.
D.J. Quiram, I-M. Hsing, A.J. Franz, R. Srinivasan, K.F. Jensen, and M.A. Schmidt, “Characterization of microchemical systems using simulations,” in the Proceedings of the 2nd International Conference on Microreaction Technology, AIChE (1998). 205-210.
B.H. Cumpston, and K.F. Jensen, “Photooxidative stability of substituted poly(phenylene vinylene) (PPV) and poly(phenylene acetylene (PPA),” J. Appl. Polymer Science, 69 (12), 2451-2458 (1998).
B.G. Willis and K.F. Jensen, “An evaluation of density functional theory and ab initio predictions for bridge bonded aluminum compounds,” J. Phys. Chem. 102(15) 2613-2623 (1998).
S.L. Firebaugh, K.F. Jensen, and M.A. Schmidt, “Investigation of high temperature degradation of platinum thin films with an in situ resistance measurement apparatus”, J. Microelectromechanical Systems, 7(1), 128-135 (1998).
S.T. Rodgers and K.F. Jensen, “Multiscale modeling of chemical vapor deposition”, J. Appl. Phys. 83 (1) 524-530 (1998).
S. Banerjee, J.V. Cole, and K.F. Jensen, “Nonlinear model reduction strategies for rapid thermal processing systems,” IEEE Trans. on Semiconductor Man., 11(2) 266-275 (1998).
J.P. Hebb and K.F. Jensen, “The effect of surface roughness on the radiative properties of patterned silicon wafers: Implications for rapid thermal processing,” IEEE Trans. Semiconductor Man.,11 (4), 607-614 (1998).
J.P. Hebb and K.F. Jensen, “The effect of patterns on thermal stress during rapid thermal processing of silicon wafers”, IEEE Trans. Semiconductor Man., 11 (1), 99-107 (1998).
KF. Jensen, I-Ming Hsing, R. Srinivasan, and M.A. Schmidt, “Reaction engineering for microreactor systems,” in Microreaction Technology, Proceedings of the First International Conference on Microreaction Technology, Springer Verlag, Berlin (1998) pp. 2-10.
1997
1997
J. S. Han and K.F. Jensen, “Evaluation of nucleation activation energy in metal CVD processes,” Korean J. Chem. Eng. 14(2), 129-135 (1997).
H. Simka, B.G. Willis, I. Lengyel, and K.F. Jensen, “Computational chemistry predictions of reaction processes in organometallic vapor phase epitaxy,” Prog. Crystal Growth and Charact., 35 (2-4) 117-149 (1997).
K.M. Vaeth and K.F. Jensen, “Chemical vapor deposition of poly (p-phenylene vinylene) based light emitting diodes with low turn-on voltages”, Appl. Phys. Letters 71 (15) 2091-2093 (1997).
I-M. Hsing, R. Srinivasan, M.P. Harold, K.F. Jensen, and M.A. Schmidt, “Finite element simulation strategies for microfluidic devices with chemical reactions,” ,” Technical Digest, International Conf. On Solid State Sensors and Actuators, IEEE (1997) pp. 1015-1018.
R. Srinivasan, S.L. Firebaugh, I-M. Hsing, J. Ryley, M.P. Harold, K.F. Jensen, and M.A. Schmidt, “Chemical performance and high temperature characterization of micromachined chemical reactors,” Technical Digest, International Conf. On Solid State Sensors and Actuators, IEEE (1997) pp. 163-166.
B.O. Dabbousi, J. Rodriguez-Viejo, F.V. Mikulec, J.R. Heine, H. Mattoussi, R. Ober, K.F. Jensen, and M.G. Bawendi, “(CdSe)ZnS core-shell quantum dots: Synthesis, optical and structural characterization of a size series of highly luminescent materials,” J. Phys. Chem. 101(46), 9463-9475 (1997).
R. Srinivasan, I.-M. Hsing, P.E. Berger, M.P. Harold, J.F. Ryley, J.J. Lerou, K.F. Jensen, and M.A. Schmidt, “Micromachined chemical reactors for heterogeneously catalyzed partial oxidation reaction”, AIChE Journal 43 (11) 3059-3069 (1997).
H. Aling, S. Banerjee, A.K. Bangia, V. Cole, J. Ebert, A. Emami-Naeini, K.F. Jensen, I.G. Kevrekidis, and S. Shvartsman, “Nonlinear model reduction for simulation and control of rapid thermal processing”, Proceedings of American Control Conference (1997).
J. Rodriguez-Viejo, B.O. Dabbousi, J.R. Heine, H. Mattoussi, J. Michel, K.F. Jensen , and M.G. Bawendi, “Cathodoluminescence and photoluminescence of CdSe/ZnS thin film quantum dot composites,” Flat Panel Display Materials II, M.K. Hatalis, J. Kanicki, C.J. Summers, and F. Funada, Proc. Mat. Res. Soc. Symp. 1997 pp. 477-482
F.V. Mikulec, B.O. Dabbousi, K.F. Jensen, M.G. Bawendi, J. Rodriguez-Viejo, “Synthesis and characterization of highly luminescent (CdSe)ZnS quantum dots,” Advances in Microcrystalline and Nanocrystalline Semiconductors, R.W. Collins, P.M. Fauchet, I. Shimizu, J-C.Vial, T. Shimada, A. P. Alivisatos, (Eds.) Mat. Res. Soc. Symp. Proc. 1997; pp. 359-64.
Rodriguez-Viejo J., K.F. Jensen, H. Mattoussi, J. Michel, B.O. Dabbousi, and M.G. Bawendi, “Cathodoluminescence and photoluminescence of highly luminescent CdSe/ZnS quantum dot composites,” Appl. Physics Letters 70 (16) 2132-2134 (1997).
J.Rodríguez-Viejo, B.O.Dabbousi, M.G.Bawendi, K.F.Jensen, “Synthesis of (CdSe)ZnS Quantum Dot Composites for Electroluminescent Devices,” in Flat Panel Display Materials II. (Eds. Hatalis, M.K.; Kanicki, J.; Summers, C.J.; Funada, F.) Proc. Mater. Res. Soc. 424, 477-482 (1997).
R. Shekhar, and K.F. Jensen, “Temperature programmed desorption investigations of hydrogen and ammonia reactions on GaN,” Surface Sci. Letters, 381 (1), L581-L588 (1997).
S.T. Rodgers, A. Balakrishna, and K.F. Jensen, “Linking macroscale and microscale CVD simulations,” Proceedings of Adv. Metalization and Interconnect Systems for ULSI XII (Eds. R. Havemann, J. Schmitz. H. Komiyama, K. Tsubouchi), Materials Research Society, (1997) pp. 335-341.
K.M. Vaeth, and K.F. Jensen, “Chemical vapor deposition of thin polymer films used in polymer-based light emitting diodes,” Advanced Materials 9, (6), 490-493 (1997).
B.G. Willis, and K.F. Jensen, “Growth chemistry of dimethylaluminum hydride,” Proceedings of Adv. Metalization and Interconnect Systems for ULSI XII (Eds. R. Havemann, J. Schmitz. H. Komiyama, K. Tsubouchi), Materials Research Society, (1997) pp. 29-34.
C.A. Wang, S. Salim, K.F. Jensen and A.C. Jones, “Characteristics of GaSb growth using various gallium and antimony precursors,” J. Crystal Growth 170, (1-4) 55-60 (1997).
B.H. Cumpston, I.D. Parker, and K.F. Jensen, “In situ characterization of the oxidative degradation of a polymeric light emitting device,” J. Appl. Phys. 81 (8), 3716-3720 (1997).
1996
1996
S. Salim, K.F. Jensen, and C.A. Wang, “In-situ monitoring of organometallic precursors by fiber-optics-based Fourier transform infrared spectroscopy,” in Metalorganics News, 10, Morton Metalorganics (Autumn 1996).
S.K. Banerjee, J.V. Cole, K.F. Jensen, A. Emami-Naeini, “Nonlinear model reduction strategies for rapid thermal processing systems,” in Rapid Thermal and Integrated Processing V Mat. Res. Soc. Symp. Proc. 429, 57-62 (1996).
J.P. Hebb, K.F. Jensen, “The effect of multilayer patterns on thermal stress during rapid thermal processing,” in Rapid Thermal and Integrated Processing V Mat. Res. Soc. Symp. Proc. 429, 43-49 (1996).
B.H. Cumpston and K.F. Jensen, “Electromigration of aluminum cathodes in polymer-based electroluminescent devices,” Appl. Physics Letters, 69, (25), 3941-3943 (1996).
J.P. Hebb and K.F. Jensen, “Pattern induced temperature nonuniformity during rapid thermal processing”, Proceedings of the 4th International Conference on Rapid Thermal Processes (RTP’96), September (1996).
R. Srinivasan, I-M. Hsing, J. Ryley, M.P. Harold, K.F. Jensen, and M.A. Schmidt, “Micromachined chemical reactors for surface catalyzed oxidation reactions,” Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, SC. June 1996. pp. 15-18.
J. P. Hebb and K. F. Jensen, “The effect of multilayer patterns on thermal stress during rapid thermal processing”, in Rapid Thermal and Integrated Processing V Mat. Res. Soc. Symp. Proc. (1996) pp. 43-49.
C.A. Wang, K.F. Jensen, A.C. Jones, and H.K. Choi, “n-AlGaSb and GaSb/AlGaSb double-heterostructure lasers grown by organometallic vapor phase epitaxy,” Appl. Phys. Lett. 68 (3) 400-402 (1996).
K.F. Jensen, T.G. Mihopoulos, S. Rodgers and H. Simka, “CVD simulations on multiple length scales,” Proc. Thirteenth Int. Conf. CVD, Electrochem. Soc., PV 96-5, 67-74 (1996).
B.H. Cumpston and K.F. Jensen, “Photo-oxidation of electroluminescent polymers,” Trends in Polymer Science 4 (5) 151-157 (1996).
R. Venkataramani and K.F. Jensen, “Analysis of TPD Spectra on Semiconductor Surfaces by Monte Carlo Simulations,” Mat. Res. Soc. Symp. Proc. 399, 109-107 (1996).
B.H. Cumpston, K.F. Jensen, F. Klavetter, E.G.J. Staring and R.C.J.E. Demandt, “Stability of PPV Derivatives: The Effect of Side Group Functionalities,” Mat. Res. Soc. Symp. Proc. 413 35-41 (1996).
S. Salim, C.A. Wang, R.D. Driver and K. F. Jensen, “In-situ Concentration Monitoring in a Vertical OMVPE Reactor by Fiber-Optics-Based Fourier Transform Infrared Spectroscopy”, J. Crystal Growth, 169(3), 443-449 (1996).
C.A. Wang, S. Salim, K.F. Jensen, A.C. Jones, “Low oxygen and carbon incorporation in AlGaAs using tritertiarybutylaluminum in organometallic vapor phase epitaxy,” J. Electron. Mater 25 (4) 771-774 (1996).
H. Simka, M. Hierlemann, M. Utz, and K.F. Jensen, “Computational chemistry predictions of kinetics and major reaction pathways of germane gas-phase reactions”, J. Electrochem. Soc. 143(8), 2646-2654 (1996).
T.P. Merchant, J. V. Cole, K. L. Knutson, J. P. Hebb, and K. F. Jensen, A systematic approach to simulating rapid thermal processing systems,” J. Electrochem. Soc. 143, 2035-2043 (1996).
J. P. Hebb and K.F. Jensen, “The effect of multilayer patterns on temperature uniformity during rapid thermal processing”, J. Electrochem. Soc. 143 (3), 1142-1151 (1996).
K.F. Jensen, H. Simka, T. G. Mihopoulos, P.Futerko, and M. Hierlemann, “Modeling Approaches for Rapid Thermal Chemical Vapor Deposition: Combining Transport Phenomena with Chemical Kinetics,” in Advances in Rapid Thermal and Integrated Processing, (F. Roozeboom, Ed.), (F. Roozeboom, Ed.) 305-332 (1996).
K. F. Jensen, T. P. Merchant, J. Vernon Cole, J. Hebb, K. L. Knutson, and T. G. Mihopoulos, “Modelling Approaches for Rapid Thermal Processing: Finite Element and Monte Carlo Methods,” in Advances in Rapid Thermal and Integrated Processing, (F. Roozeboom, Ed.) 265-304 (1996)
